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    吕苗


    教授、博士生导师

    联系电话:0592-2187163

    电子邮件:lm@xmu.edu.cn

    地址:厦门大学亦玄馆303室

     

         研究领域为纳米技术和柔性材料在MEMS传感器中的应用,微型分析仪器和医疗器械。 1995-2005 年中国电子科技集团公司第十三研究所微米纳米中心工作,任副主任( 2001-2005 ) , 教授级高工( 2006 ), 2006.1 ~2007.1 香港科技大学机械工程系 , 博士后, 2007.2 ~ 2009.9, 明尼苏达大学机械工程系,博士后,曾作为负责人承担多项自然基金、国防预研、新产品研制项目、国防重点基金、 863 等项目,获国防科学技术进步二等奖 2 次,国防科学技术进步三等奖 3 次,信息产业部科技进步二等奖 1 次,《微纳电子技术》编委 , 《journal of nanoscience and nanotechnology》,《半导体技术》,《半导体学报》等审稿人。研究领域包括:纳米技术和柔性材料在MEMS传感器中的应用,生物检测和微型医疗器械。现承担基金委仪器专项、科技部重大仪器专项子课题和福建省产研重大项目等,总经费超过500万元。

         实验室网站: http://mnems.xmu.edu.cn

     

    杂志文章:

    (1)Hongda Sun, ShengFeng Deng, Xiaobin Cui, Miao Lu, “Fabrication of microlens arrays with varied focal lengths on curved surfaces using electrostatic deformed template”. J. Micromech. Microeng. 24, 065008 (6pp), 2014

    (2)Yaqin Cheng, Hongda Sun, Xiaobin Cui, ShengFeng Deng, Miao Lu, “Combined optical dispersion by prism and arrayed waveguide grating with multiple diffraction orders for Raman spectrometer” Optics and Spectroscopy, 117, 3 pp. 480-485, 2014

    (3)Tun Wang, Liu Bin, Shusen Jiang, Hao Rong, Miao Lu, “A local bottom-gate structure with low parasitic capacitance for dielectrophoresis assembly and electrical characterization of suspended nanomaterials” , J. Micromech. Microeng. 24, 055025 (7pp) 2014

    (4)Hao Rong, Wei-Qing Lin, Jin-Cheng Zheng, Miao Lu,“Thermal characterization of a bridge-link carbon nanotubes array used as a thermal adhesive”International Journal of Adhesion & Adhesivespp.4958–63,2014

    (5)Zhao Wu,Qing-na Wang, Hong-da Sun and Miao Lu,“Shape-controllable polymeric microlens array duplicated by electrostatic force deformed template”,Optical Engineering 52(6),063401,2013

    (6)Hao Rong, Baoming Wang, Lichao Sun, Huiqiong Wang, Miao Lu, “Fluidic aligned, dense SWNTs arrays as potential die adhesive and thermal interface material”, Soldering & Surface Mount Technology, 25(1), pp. 45-50,2013

    (7)Feng Zhu, Jiawei Yan, Miao Lu, Yongliang Zhou, Yang Yang and Bingwei Mao,“A strategy for selective detection based on interferent depleting and redox cycling using the plane-recessed microdisk array electrodes”, Electrochimica Acta 56pp. 8101-8107, 2011.

    (8)Yang Yang, Jun-Yang Liu, Zhao-Bin Chen, Jing-Hua Tian, Xi Jin, Bo Liu, Xiulan Li, Zhong-Zi Luo, Miao Lu, Fang-Zu Yang, Nongjian Taoand Zhong-Qun Tian, “Conductance histogram evolution of an EC-MCBJ fabricated Au atomic point contact”, Nanotechnology, 22, 27, 275313, 2011

    (9)Yi Luo, Miao Lu, and Tianhong Cui “A Polymer-Based Bidirectional Micropump Driven by a PZT Bimorph”, Journal of Microsystem Technologies,17, 3, pp. 430-409, 2011

    (10)Miao Lu, Jijun Xiong and Tianhong Cui,“A Flexible Tri-Axis Contact Force Sensor for Tubular Medical Device Applications”J. Micromech. Microeng. 21, 035004 (8pp), 2011

    (11)Miao Lu, Xuekun Lu, Min-Woo Jang, Stephen A. Campbell, and Tianhong Cui,“Characterization of Carbon Nanotube Nanoswitches with Gigahertz Resonance Frequency and Low Pull-in Voltages Using Electrostatic Force Microscopy” J. Micromech. Microeng. 20, 105016 (7pp), 2010

    (12)Miao Lu, M-W. Jang, S. A. Campbell, T. H. Cui, “al”, Journal of Vacuum Science and Technology B 28(3), pp. 522-526, 2010

    (13)Miao Lu, Dongjin Lee, Taiho Yeomx, Tianhong Cui, “Micro Tactile Sensors with a Suspended and Oriented Single Walled Carbon Nanotube Beam Embedded in Polydimethylsiloxane Elastomer” Sensors Letters. Vol. 8, 639–644, 2010

    (14)Miao Lu, M-W. Jang, G. Haugstad, S. A. Campbell, T. H. Cui, “Well-aligned and suspended single-walled carbon nanotube film: Directed self-assembly, patterning, and characterization” Appl. Phys. Lett.94, 261903,2009

    (15)Miao Lu, Dongjin Lee, Wei Xue,and Tianhong Cui “Flexible and Disposable Immunosensor based on Layer-by-Layer Self-Assembled Carbon Nanotubes and Biomolecules” Sensors & Actuators A , pp. 280-285, 2009

    (16); ; ; ; ; “Development of a MEMS-based RF low-phase-noise voltage controlled oscillator” 半导体学报, v 27, n 5, May, p 900-904 ,2006

    (17)Shan F Q, Lu Miao, Gao B X “Rectangular Increasing Distance Spiral Slots (RIDSS) PBG Applied to MEMS Frequency-Reconfigurable Antenna Design” Microwave and Optical Technology Letters Vol.47, Issue.4, page 394-395, 2005

    (18)R. H. Guo, Z. P. Zhao and Miao Lu, “Retention Model of Single-Electron Memory (SEM) Using Disintegration Theory” International Journal of Nonlinear Sciences and Numerical Simulation, 2005, v.6 n.4, 431-434.

    (19)Guo, Rong-Hui; Zhao, Zheng-Ping; Hao, Yue; Liu, Yu-Gui; Wu, Yi-Bin; Lu, Miao “Realization and Output Characteristics Analysis of the Multiple Islands Single-Electron Transistors “ 物理学报,v 54, n 4,April, 2005, p 1804-1808

    (20)Lu,shuhai; Luo, Rong; Yang, Yongjun; Lu, Miao; “Application of SDB technique in a MEMS accelerometer” 机械工程学报 2005, 12(s), 434-436

    (21)Luo, Rong; Xu, Aidong; Wang, Wei; Lu, Miao; “Realization of a rapid micro oscillating PCR chip机械工程学报 2005, 12(s), 88-90

    (22)Li, Qian; Zhao,Rihua; Lu,Miao; Hu, Xiaodong; “Design and realization of a low loss X-Band RF MEMS bandpass filter”机械工程学报 2005, 12(s), 231-234

    (23)Lin, Haifeng; Lu, Miao; Yang, Yongjun; Shi, Qian; En, Yunfei; “Reliability considerations and experiments of MEMS capacitive accelerometers”机械工程学报 2005, 12(s), 231-234

    (24)Lu Miao, Zhao Zhengping, Hu Xiaodong, Zou Xuefeng, Guo Hejun “Microelectromechanical System Switching Isolation Amplifier for Low Frequency Measurement” Journal of Microlithography, Microfabrication, and Microsystems, 2004, July, 467-471.

    (25)Lu miao, Zhao Zhengping, Lou Jianzhong, Gu Hongming, Hu Xiaodong, Li Qian “Thermal Effects and RF Power Handling of a DC-5GHz MEMS Switch” 半导体学报, 2004, 25(7), 749-755.英文版

    (26)Lou, Jianzhong; ; ; ; , “DC-to-32 GHz 2 bit MEMS phase shifter” 半导体学报, 2004, 25 (11) p 1386-1390

    (27)Gu, Hongming; Lu, Miao; Liang, chunguang; Gao Baoxing; “MEMS class E amplifier” 半导体学报, v 24, n 4, April, 2003, p 401-405

    (28)Lu Miao, Zhao Zhengping, Hu Xiaodong, Zou Xuefeng, Lin Haifeng and Guo Ronghui “Adaptive Contact for Improving the Behavior of Silicon MEMS Switches”. J. Micromech. Microeng. 2002, 12, 696-701.

    (29)Miao Lu, Yan-Jun Zhao, Xiao-Dong Hu, Xue-Feng Zou, Zheng-Ping Zhao, “Measurement of Adhesive Force between Micro Surfaces With a Novel Micro Leverage Structure” International Journal of Nonlinear Sciences and Numerical Simulation, 2002, 3(3), 419-422.

    (30)Xiao-Dong Hu, Jing Pan, Miao Lu, Xue-Feng Zou, Hai-Feng Lin, “Failure Mechanisms of a Micro Fabricated Relay” International Journal of Nonlinear Sciences and Numerical Simulation 2002, 3(3), 361-364.

    (31)Cui Tianhong, Zhou Zhaoying, Wang Xiaohao, Ye Xiongying, Yang Yue, Zhang Wendong, Lu Miao, Zhao Yanjun“Key Technologies of Thermally Actuated Silicon Micropump” 机械工程学报 1999, 35(1), 39-42

    (32)Yao Yahong, Gao Zhongyu, Lu Miao, Zhao Yongjun, Zhao Yanjun“Study on Fabrication of Micromechanical Inertial Instruments with Bulk Silicon Dissolved Wafer Process”: 清华大学学报 1998, 38(11), 12-15.

    (33)Yao Yahong; Zhao Yongjun; Lu Miao; Pi Shun; Li Jiang; Zhao Yanjun“High Aspect Ratio Trench Etching of Si using CCl2Fe2O2 Gas Mixture” 半导体学报1998, 19(7), 542-547.

    国际会议论文:

    (1)Y. Cheng, S. Deng, Y. Xu, M. Lu*, “Design and Simulation of arrayed waveguide grating (AWG) for micro Raman spectrometer”, Proc. of SPIE, Vol.8419, p.841908, 2012

    (2)Z. Wu, H. Sun, S. Jiang, M. Lu*, “Free-form polymeric micro lens array molded by electrostatic force deformed template”, Proc. of SPIE, Vol.8418, p.841807, 2012

    (3)B. Wang, H. Rong, and M. Lu*, “ECS Trans. 44 (1), pp1381-1384, 2012

    (4)H. Rong, B. Wang, M. Lu*, “Fluidic aligned, dense SWNTs arrays as potential die adhesive and thermal interface material”, Proc. - Int. Symp. Adv. Packag. Mater.pp. 440-445, 2011

    (5)Jang, M.W.; Lu, M.; Cui, T.; Campbell, S.A.;“A 1.6 GHz NEMS actuator built from carbon nanotube layer by layer composite films” Device Research Conference(DRC)2009, PA, USA, June , pp. 29-30,2009

    (6)Miao Lu, Dongjin Lee, Taiho Yeomx, Tianhong Cui, “Fabrication of Micro Tactile Sensor With Suspended, Oriented Single Wall Nanotube Beam Embeded In PDMS Elastomer” Transducers’2009, Denver, June, pp. 457-460, 2009

    (7)MinWoo jang, Miao Lu, Tianhong Cui, Stephen A. Campbell, “Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly” Transducers’2009, Denver, June, pp.912-915, 2009

    (8)Miao Lu, Dongjin Lee, Wei Xue,and Tianhong Cui “Flexible Flexible and Disposable Immunosensor based on Layer-by-Layer Self-Assembled Carbon Nanotubes and Biomolecules” IEEE MEMS 2008, Tucson, U.S.A pp 188-191, 2008

    (9)Miao Lu, Amine Bermark and Yi-Kuen Lee “ Fabrication Technology of Piezoresistive Conductive PDMS for Micro Fingerprint Sensors” IEEE MEMS 2007, Kobe, Japan,pp.413-416, Jan21-25,2007

    (10)J. Lu, M. Lu, A. Bermak and Y.-K. Lee, “Study of Piezoresistance Effect of Carbon Nanotube-PDMS Composite Materials for Nanosensors,” IEEE Nano 2007, Hong Kong, pp.1240-1243, Aug 2-5, 2007

    (11)Guo, Rong-Hui; Zhao, Zheng-Ping; Lu, Miao, “Analysis of the tunnel junction current”Proceedings of SPIE - The International Society for Optical Engineering, v 5774, Fifth International Conference on Thin Film Physics and Applications, 2005, p 551-554

    (12)Jianzhong Lou,Zhengping Zhao, Yang Ruixia, Miao Lu, Xiaodong Hu “A novel DMTL MEMS Phase Shifter” The 4th International Conference on Microwave and Millimeter Wave Technology, Beijing, China August, 2004

    (13)Jianzhong Lou,Zhengping Zhao, Yang Ruixia, Miao Lu, Xiaodong Hu “A DC-to-32GHz 2-Bit MEMS Phase Shifter” IEEE Antennas and Propagation Society Symposium, June20~25,2004. Monterey, California June, 2004, pp2867~2870.

    (14)Zhengping Zhao, Miao Lu, Shuanqing Li, Yongjun Yang and Yongqing Xu,“MOEMS Devices Based on Developing MEMS Process” SODC’2002 March 10-16 2002, Stuttgart, Germany

    (15)Lu Miao,Hu Xiaodong, Zou Xuefeng, Guo Hejun, Zhao Zhengping “An Alternative Silicon Dissolved Process to Prevent Adhesion by “Liquid Bridge”” in Proc. Pacific Rim Workshop on transducers and Micro/Nano Technologies, Xia’Men, China, Aug. 2002.

    (16)Xiaodong Hu, Miao Lu, Maohui Hou, Qingguo He, Cuizhuo Gao, Xiwei Bai, Zhengping Zhao“A Compact Serial RF MEMS Switch for S-band Application” Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference, Vol 2, 2001, 733 –738.

    (17)Lu Miao, Zhao Zhengping, Hu Maodong, Guo Hejun, Zou Xuefeng, Liu Yanqing, Yang Yong “Testing and Analysis of Lifetime of a Vertical Bulk MEMS switch” Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference, Oct. 2001.


    获得的专利:

    Tianhong Cui and Miao Lu, “Flexible Sensors for Medical Devices”, US Patent Application No. 61/235,937, July 2010.


    中国发明专利:

    (1)一种采用阵列波导光栅的拉曼光谱仪芯片 201110358166.7 授权公告日:2014.4.1

    (2)一种提高特征峰附近光谱分辨率的拉曼光谱仪芯片 201110359275.0 授权公告日: 2014. 1. 20

    (3)一种集成化微型光纤光谱仪,201010509946.2 授权公告日: 2012.07.04

    (4)采用V型槽介质隔离工艺的体硅加工方法,03143278.6 授权公告日: 2006.2.8

    (5)全干法深刻蚀硅溶片制造方法03112020.2授权公告日: 2006.03.29

    (6)基于硅硅键合的全干法深刻蚀微机械加工方法03143281.6授权公告日: 2005.9.7

    (7)水银式微机械惯性开关的制造方法 ZL01.1.42036.7

     

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